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Institute of Control Systems (IRS)
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Prof. Dr.-Ing. Sören Hohmann
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Prof. Dr. rer. nat. habil. Marc Eichhorn
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Institute of Control Systems (IRS)
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Modellierung und regelungstechnische Kompensation nichtlinearer mechanischer Effekte innerhalb eines hybriden Nanopositioniersystems
Type:
Master Thesis
Supervisor:
M. Sc. Andreas Zürcher
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